Dual Beam Focused Ion Beam

Dual Beam Focused Ion Beam
Versa™ 3D DualBeam™ (FIB/SEM)

The instrument is a Focused Ion Beam (FIB) combined with a Scanning Electron Microscopy (SEM). In a DualBeam, the electron and ion beams intersect at a 52° angle at a coincident point near the sample surface, allowing immediate, high resolution SEM imaging of the FIB-milled surface. Such systems combine the benefits of both the SEM and FIB and provide complementary imaging and beam chemistry capabilities.


Main instrument features:

  • The combination of high and low vacuum modes gives the flexibility to work with a range of samples including uncoated and non-conductive samples
  • Environmental SEM (ESEM) mode allows electron beam imaging of naturally hydrated samples
  • Software routines for ease of use and automation
  • SEM resolution down to 1.2 nm and FIB resolution down to 5 nm, depending on the operating conditions
  • Patterning system included
  • Electron/ion assisted deposition of Pt and C (there is the possibility to deposit also other 3 elements)
  • Manipulation system Omniprobe 100.7 for in-situ TEM lamellae preparation