X-ray Photoelectron Spectroscopy (XPS)

X-ray Photoelectron Spectroscopy (XPS)
PHI 5000 VersaProbe II

The instrument is equipped with a monochromatic, micro-focused, scanning X-ray source which provides excellent large area and superior micro-area spectroscopy performance.

Spectroscopy, depth profiling and imaging can all be performed over the full range of X-ray beam sizes including the minimum X-ray beam size of less than 10 µm. The multi-technique includes a UV lamp for Ultraviolet Photoelectron Spectroscopy (UPS) measurements.

Main instrumental features:

• Monochromatic X-ray source
• UV He-I and He-II lamp
• C₆₀ gun, Ar ion gun, electron gun
• Spatial resolution better than 10 μm
• Cold - Hot sample stage