X-ray Photoelectron Spectroscopy (XPS)

X-ray Photoelectron Spectroscopy (XPS)
PHI 5000 VersaProbe II

The instrument is equipped with a monochromatic, micro-focused, scanning X-ray source which provides excellent large area and superior micro-area spectroscopy performance. Spectroscopy, depth profiling and imaging can all be performed over the full range of X-ray beam sizes including the minimum X-ray beam size of less than 10 µm. The multi-technique includes a UV lamp for Ultraviolet Photoelectron Spectroscopy (UPS) measurements and a hot/cold sample stage.

Example of XPS multi-point analysis		Main instrumental features: Monochromatic X-ray source UV He-I and He-II lamp C60 gun, Ar ion gun, electron gun, flood gun Spatial resolution better than 10 μm Cold - Hot sample stage
Survey spectra		O1s narrow spectrum